| 000 | 01137cam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | 13407099 | ||
| 003 | OSt | ||
| 005 | 20181220152402.0 | ||
| 008 | 031117m20029999caua b 001 0 eng | ||
| 010 | _a 2003283097 | ||
| 020 | _a0961672161 (v. 1) | ||
| 040 |
_aDLC _cIISER Bhopal _dDLC |
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| 050 | 0 | 0 |
_aTK7874 _b.W635 2002 |
| 082 | 0 | 0 |
_a621.38173 W831S2 _223 |
| 100 | 1 |
_aWolf, Stanley. _922760 |
|
| 222 | _aEECS-reference book collection | ||
| 245 | 1 | 0 |
_aSilicon processing for the VLSI era: _cStanley Wolf, Richard N. Tauber. _bVolume-I Process Technology |
| 250 | _a2nd ed. | ||
| 260 |
_aSunset Beach, Calif. : _bLattice Press, _c2000. |
||
| 300 |
_axxxvi, 890p. _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographies and indexes. | ||
| 505 | 1 | _av. 1. Process technology | |
| 650 | 0 |
_aSemiconductors _xEtching. _922761 |
|
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration. _922762 |
|
| 650 | 0 |
_aSilicon. _922763 |
|
| 700 | 1 |
_aTauber, Richard N. _922764 |
|
| 906 |
_a7 _bcbc _corigcop _d2 _encip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c8437 _d8437 |
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