Fundamentals of microfabrication - Madou, Marc J. (Boca Raton, Fla. : CRC Press, 1997)
Includes bibliographical references (p. 565-569) and index.
Keywords: Microelectronics; Integrated circuits -- Design and construction; Microelectromechanical systems -- Design and construction; Machining; Microelectronic packaging; Lasers -- Industrial applications