The science and engineering of microelectronic fabrication / (Record no. 8443)

MARC details
000 -LEADER
fixed length control field 01320cam a2200301 a 4500
001 - CONTROL NUMBER
control field 3034508
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20180529101003.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 950719s1996 nyua b 001 0 eng
035 ## - SYSTEM CONTROL NUMBER
-- (DLC) 95035577
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 95035577
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0195105087 (cl : acidfree paper)
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7871.85
Item number .C25 1996
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/2
Edition number 20
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Campbell, Stephen A.,
Dates associated with a name 1954-
9 (RLIN) 22778
245 14 - TITLE STATEMENT
Title The science and engineering of microelectronic fabrication /
Statement of responsibility, etc Stephen A. Campbell.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New York :
Name of publisher, distributor, etc Oxford University Press,
Date of publication, distribution, etc 1996.
300 ## - PHYSICAL DESCRIPTION
Extent xv, 536 p. :
Other physical details ill. ;
Dimensions 25 cm.
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE
Title Oxford series in electrical engineering
9 (RLIN) 22779
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors
General subdivision Design and construction.
9 (RLIN) 22780
856 42 - ELECTRONIC LOCATION AND ACCESS
Materials specified Publisher description
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html">http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html</a>
856 41 - ELECTRONIC LOCATION AND ACCESS
Materials specified Table of contents only
Uniform Resource Identifier <a href="http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html">http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html</a>
906 ## - LOCAL DATA ELEMENT F, LDF (RLIN)
a 7
b cbc
c orignew
d 1
e ocip
f 19
g y-gencatlg
920 ## -
-- ** LC HAS REQ'D # OF SHELF COPIES **
991 ## -
-- c-GenColl
-- TK7871.85
-- .C25 1996
-- 00036330685
-- Copy 1
-- BOOKS

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