The science and engineering of microelectronic fabrication / (Record no. 8443)
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000 -LEADER | |
---|---|
fixed length control field | 01320cam a2200301 a 4500 |
001 - CONTROL NUMBER | |
control field | 3034508 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20180529101003.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 950719s1996 nyua b 001 0 eng |
035 ## - SYSTEM CONTROL NUMBER | |
-- | (DLC) 95035577 |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
LC control number | 95035577 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0195105087 (cl : acidfree paper) |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | DLC |
Transcribing agency | DLC |
Modifying agency | DLC |
050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
Classification number | TK7871.85 |
Item number | .C25 1996 |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815/2 |
Edition number | 20 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Campbell, Stephen A., |
Dates associated with a name | 1954- |
9 (RLIN) | 22778 |
245 14 - TITLE STATEMENT | |
Title | The science and engineering of microelectronic fabrication / |
Statement of responsibility, etc | Stephen A. Campbell. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc | New York : |
Name of publisher, distributor, etc | Oxford University Press, |
Date of publication, distribution, etc | 1996. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xv, 536 p. : |
Other physical details | ill. ; |
Dimensions | 25 cm. |
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE | |
Title | Oxford series in electrical engineering |
9 (RLIN) | 22779 |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc | Includes bibliographical references and index. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Semiconductors |
General subdivision | Design and construction. |
9 (RLIN) | 22780 |
856 42 - ELECTRONIC LOCATION AND ACCESS | |
Materials specified | Publisher description |
Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html">http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html</a> |
856 41 - ELECTRONIC LOCATION AND ACCESS | |
Materials specified | Table of contents only |
Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html">http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html</a> |
906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
a | 7 |
b | cbc |
c | orignew |
d | 1 |
e | ocip |
f | 19 |
g | y-gencatlg |
920 ## - | |
-- | ** LC HAS REQ'D # OF SHELF COPIES ** |
991 ## - | |
-- | c-GenColl |
-- | TK7871.85 |
-- | .C25 1996 |
-- | 00036330685 |
-- | Copy 1 |
-- | BOOKS |
No items available.