Silicon processing for the VLSI era: (Record no. 8437)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01137cam a2200325 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 13407099 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20181220152402.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 031117m20029999caua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2003283097 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0961672161 (v. 1) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | IISER Bhopal |
| Modifying agency | DLC |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7874 |
| Item number | .W635 2002 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38173 W831S2 |
| Edition number | 23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Wolf, Stanley. |
| 9 (RLIN) | 22760 |
| 222 ## - KEY TITLE | |
| Key title | EECS-reference book collection |
| 245 10 - TITLE STATEMENT | |
| Title | Silicon processing for the VLSI era: |
| Statement of responsibility, etc | Stanley Wolf, Richard N. Tauber. |
| Remainder of title | Volume-I Process Technology |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Sunset Beach, Calif. : |
| Name of publisher, distributor, etc | Lattice Press, |
| Date of publication, distribution, etc | 2000. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxxvi, 890p. |
| Other physical details | ill. ; |
| Dimensions | 25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographies and indexes. |
| 505 1# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | v. 1. Process technology |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors |
| General subdivision | Etching. |
| 9 (RLIN) | 22761 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| General subdivision | Very large scale integration. |
| 9 (RLIN) | 22762 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Silicon. |
| 9 (RLIN) | 22763 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tauber, Richard N. |
| 9 (RLIN) | 22764 |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | origcop |
| d | 2 |
| e | ncip |
| f | 20 |
| g | y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Not For Loan | Reference | Central Library, IISER Bhopal | Central Library, IISER Bhopal | Reference Section | 20/12/2018 | 1 | 13067.00 | 621.38173 W831S2 | 9528 | 20/12/2018 | 16333.35 | 20/12/2018 | Books | Reserve |